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编者注：本词条为中国台湾地区学术名词用语，仅供参考。
单词
inductively coupled plasma chemical vapor deposition
释义
inductively coupled plasma chemical vapor deposition
感应耦合电浆化学气相沉积
电机工程名词
inductively coupled plasma chemical vapor deposition
电感耦合电浆化学气相沉积
电子工程名词
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